FlexGas™ Mini-Purge Cylinder Gas Cabinet

Download FlexGas™ Mini- Purge Brochure

The FlexGas™ Mini-Purge Gas Cabinet is a re-packaged wall-mount version of the widely successful full-size FlexGas™ . This miniature semi/manual gas cabinet boasts all of the same features, component quality and UHP construction of the FlexGas™ . Housing one process cylinder (up to 19”H x 8”D). With the addition of the optional FlexPowr™ Controller, the FlexGas™ Mini-Purge Cabinet can support a myriad of automated ALARM and panel SHUTDOWN options such as: Excess Flow Sensors, Low Cylinder Pressure Alarms, High Delivery Pressure Alarms, Gas Leak Sensors, Scales and more. The FlexPowr™ Controller can support up to eight (8) user-settable alarm inputs and eight (8) user-settable alarm outputs. EMO slam button and Exhaust Pressure Sensor are included with the FlexPowr™ Controller option.

From the “Fab to the Lab,” SDC puts first tier semiconductor grade safety and quality within reach. For more hazardous applications, be sure to see the Ciphercon™ Fully Automated wall mount gas cabinet.

FlexGas™ Mini-Purge makes it easy to meet your exact gas delivery needs. Our modular design concept allows you to use a building-block method to configure a gas cabinet to your specifications. Add safety and peace-of-mind by purchasing the optional FlexPowr™ Controller. Simply select which panels you want to shutdown on ALARM, and they will be fitted with a normallyclosed ESO Valve for automatic shutdown. The FlexPowr™ Controller supports up to 8 dry contact alarm inputs. Exhaust pressure switch, gas leak detection, and UVIR are just some of the optional controls components available to prompt shutdown.

Cylinder Cabinet
Standard Configurations:

• 1-cyl, [1-process]

Gas Panel/Manifold Purity
Standard Configurations:

• UHP: panels & manifolds are orbitally welded/VCR® construction, 316L SS [20Ra]
• UHP grade regulator
• UHP grade diaphragm valves

HP Gas Panels
Standard Configurations:

• 3-Valve design [HP vent]
• 4-Valve design [adds PURGE]
• 6-Valve design [adds EVAC]

Gas Panels/Options
Standard Configurations:

• 10 Ra surface finish
• Dual stage regulators
• Outlet filters (0.003 um)
• DISS cylinder fittings

Optional FlexPowr™ Controller:

• Automatic shutdown of process gas panels
• Up to 8 user-definable inputs
• Audible/visible alarm indication
• EMO button
• Multilevel password protection

FlexPowr™ Controller Components:

• Exhaust pressure switch
• HI cylinder pressure switch
• HI delivery pressure switch
• Integrated gas leak detection
• UVIR detection
• Excess flow sensor

Other Equipment Options:

• Adjustable cylinder shelves
• Restrictive flow orifices
• Cylinder scales
• CGA torque wrenches

Dimensions*

• 1-cyl: 18”W x 38”H x 17”D

* Includes optional FlexPowr™ controller.

Codes and Standards Referenced:

• ASME Section IX
• CGA®
• CE®
• Semi S2®
• NFPA®
  
• UL®

Please note that manual and/or semi-automated systems like the FlexGas™ are not recommended fur use in all applications. SDC recommends that FULLY AUTOMATED SYSTEMS be used for toxics, corrosives, pyrophorics, and other highly hazardous gases/ liquified gases.

Standard 1-cyl configuration
with external purge