CiphercoN™ 1500 Fully Automated Gas Cabinet
The CiphercoN™ 1500 fully-automated gas cabinet is representative of SDC®'s continuous drive and commitment to providing the semiconductor, PV/solar, biotech, aerospace and advanced materials, industry’s safest and most reliable Ultra-High-Purity (UHP) specialty gas equipment available. Mass customization and modular design concepts of the gas panels, controls architecture and cabinet enclosure have combined to widen the product configuration spectrum and greatly increase user flexibility.
From the Fab to the Lab, SDC® sets itself apart as the clear choice for value in today’s budget-conscious environment. From silane (SiH4), ammonia (NH3), Hydrogen Sulfide (H2S) to Hydrogen Selenide (H2Se) gas cabinets for research & development and/or production solutions, you can count on SDC.
The CiphercoN™ 1500 makes it simple to meet your exact gas delivery needs. Our modular design concept allows for component-level replacement, ease of service and upgradeability. Begin by choosing one of several "core" gas cabinet configurations. Start customizing right at the gas panel level with standard choices for regulator type, valve type, transducer ranges and purity level. Zero in further with a myriad of options like integrated scales, onboard gas leak detection, purgeable splitters, RFO, filtration, purification, and many more. SDC®'s SPEC √™ checklist will walk you through this process in a simple, step-by-step manner. Our Sales Engineers are always available to work through the customization process with you too, either by phone, or in person.
Control Features
- PLC control of all critical functions
- Bright 10.4" color touch screen interface
- Proven auto-sequenced routines for all aspects of operations and maintenance
- User settable limits for all process and alarm parameters
- Exhaust pressure monitor
- On-screen warnings, alarms, prompting and instructions
- Emergency Off (EMO)
- EMO and EGO inputs
- Alarm outputs
- Multi-level password protection
- Diagnostics screen
- Valve cycle count screen
- Z-Purge ready for Class I Div II compliance
Process Panel Features
- Ultra-High-Purity (UHP) 316L SS or VAR construction
- Surface finish 10 Ra avg. or better
- Springless diaphragm valves
- Tied-diaphragm process regulator
- Precision flow sensor
- Vacuum assisted purging
- UHP orbitally welded with strategic VCR® breaks
- Helium leak tested to 1.0 x 10-9 atm*cc/s
- CLASS 100 / CLASS 10 cleanroom assembly and tested
Standard Configurations
- 2-cyl, [1-process, 1-purge]
- 2-cyl, [2-process], external purge source
- 3 cyl, [2-process, 1-purge]
- Independent out or autoswitchover
- Cabinet-to-cabinet switchover
Dimensions*
- 1 cyl: 24"W x 84"H x 19"D
- 2 cyl: 24"W x 84"H x 19"D
- 3 cyl: 36"W x 84"H x 19"D
* Height dimensions include controller. Add 6.0" to width with cylinder heating option.
Options
Codes and Standards
- SME Section IX
- SEMI™ S2 Safety Guidelines for Semiconductor Manufacturing Equipment
- NFPA® 79, 496, 70 [NEC®]
- Factory Mutual®
- UL®
- CE®
- CGA G-13
Exhaust Specifications & Requirements
Pneumatic Supply | adjustable to 90 psig | 1 slm max. |
Process Purge | adjustable to 80 psig | 30 slm max. |
Vacuum Drive |
adjustable to 85 psig | 85 slm max. |
Process Vent | >1.0" WC | 100 slm |
Power | 110V / 3A | N/A |
Sprinkler (if used) | 30 psig | 31 gpm |
Exhaust* | 0.15" WC | 300 scfm (2-cyl) |
0.15" WC | 450 scfm (3-cyl) |