FlexGas™ Valve Manifold Panel

The FlexGas™ Valve Manifold Panel is designed to meet the most demanding requirements for safe handling and Ultra-High-Purity (UHP) delivery of many process gases. A myriad of configurations are available to deliver to up to eight (8) points-of-use in this compact UHP package. The FlexGas™ VMP is another example of SDC’s continuous drive and commitment to providing the industry’s safest and most reliable UHP specialty gas equipment available.

Mass customization and modular design concepts of gas panels and FlexPowr™ Controller architecture have combined to widen the product configuration.

From the Fab to the Lab to the University, SDC sets itself apart as the clear choice for value in today’s budget conscious environment.

All UHP orbital welding performed in a Clean Room by ASME® Section IX Certified Weld Technicians.

• For automatic shutdown of VMP
• For individual stick shutdown (up to 4 sticks)
• Color touch screen display
• User configurable - INPUTS/OUTPUTS

• UHP 316L SS or VAR components, fittings and tubing
• 10 Ra internal surface finish
• Manufactured to “semiconductor grade” standards
• Modular design

• 4-stick [0-4 sticks populated]
• 8-stick [0-8 sticks populated]

• 18.5”W x 21”H* x 8.75”D
  *27”H w/FlexPowr™ Controller

• Pneumatic EMO only
• FlexPowr™ controller
• Inlet filtration/purification
• PURGE CIRCUIT
• EVAC CIRCUIT
• HI-FLOW models
• Pressure regulator (gas stick)
• Pressure gauge (gas stick)
• Pressure Transducer (gas stick)
• Filter (0.0003 μm) (gas stick)
• Excessive flow switch (gas stick)
• Automatic stick shutdown (up to 4 sticks)