PureCursor™ Liquid Delivery System

Download PureCursor LDS Brochure

The SDC PureCursor™ LDS (liquid delivery system) is an Ultra-High-Purity liquid chemical delivery system designed for use in CVD and other applications. The single container PureCursor™ LDS is a FULLY AUTOMATED system using a pressure dispense method. It is capable of housing vessel sizes up to 90 liters (depending on the chemical supplier). Fitted with its optional purgeable splitter manifold, the PureCursor™ can independently deliver to 2, 3 or 4 points-of-use.

The PureCursor™ LDS can be configured as a small single source system, or as a bulk autoswitchover system for higher usages and uninterrupted supply. Let SDC configure budget-conscious unit that meets your exact requirements!

Container Cabinets Standard Configurations:

• 1-container, [independent out]
• 2-container, [auto-switchover]

Standard Controls Features:

• PLC control of all critical functions
• Bright 10.4" color touch screen interface
• Proven auto-sequenced routines for all aspects of operations & maintenance
• User settable limits for all process and alarm parameters
• Exhaust pressure monitor
• On screen warnings, alarms, prompting and instructions
• Emergency Off [EMO]
• EMO and EGO inputs
• Alarm outputs
• Multi-level password protection
• Diagnostics screen
• Valve cycle count screen
• Z-Purge ready for Class I Div II compliance

PureCursor™ LDS Process Panel Features:

• Ultra-High Purity [UHP] 316L SS or VAR
• Surface finish 10Ra
• Springless diaphragm valves
• Precision pressure transducers
• UHP orbitally welded w/strategic VCR® breaks
• Helium leak tested to 1 x 10-9 atm*cc/s
• CLASS 100 / CLASS 10 clean room assembly and test

Other Features Standard:

• 11 gauge, fully seam-welded enclosure
• 110% spill containment
• Sump liquid leak sensor
• Self-closing, self-latching door and access door

Codes & Standards Referenced:

• ASME Section IX
• SEMI S-2
• NFPA® 79, 496, [NEC®]
• Factory Mutual®
• CE®

* Damper must be adjusted to meet 200 fpm face velocity as required by UFC.

Please contact us for further details.

PureCursor™ LDS
[shown as a single source,
for up to 90l]