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Bubblers

Download SDC Bubbler with Horizontal Fill-Ports pdf
Download SDC Bubbler with Vertical Fill-Ports pdf

SDC manufactures stainless steel bubblers designed to deliver ultra high-purity (UHP) precursors to the reaction zone during a fabrication process. Manufactured in a 10/100 clean room ensures product quality and integrity. Each UHP bubbler is pneumatically tested 1.0 x 10-9 ATM*CCS to ensure leak-free service. SDC's standard sizes for horizontal and vertical valve UHP bubblers are listed below.

UHP bubbler options include:

  • Horizontal Valve Configuration
  • High Pressure Valves
  • High Temperature Valves
  • Thermal Well (1/4”OD, 0.180”OD)
  • Electro-Polish
  • Remove Dip Tube and 1/8” Diffuser (20 um diffuser, std.)
  • Other Options Available

sdc uhp bubbler

SDC Bubbler with Vertical Fill-Port and Angled Valves

Custom built bubblers to meet your equipment or OEM specifications are also available. Please contact our factory at 845-246-3631 or info@stainlessdesign.com for more information.

SDC Standard UHP Bubbler with Horizontal Fill-Ports:

uhp bubbler drawing outlet of uhp bubbler drawing uhp bubbler drawing outlet of uhp bubbler drawing

NOTE: VESSEL PRESSURE AND TEMPERATURE RATINGS VARY DEPENDING ON VALVE SELECTION.

Size/ Cyl Vol (mL) Part Number A (in/mm) B (in/mm)
C (in/mm)
D (in/mm) E (in/mm) F Figure
150 mL 50-01269A-H 1.50 / 38.1 6.75 / 171.5
4.89 / 124.2
3.37 / 85.6 11.64 / 295.7 1/4" FVCR 1
300 mL 50-01270A-H 2.00 / 50.8 7.25 / 184.2
4.89 / 124.2
3.37 / 85.6 12.14 / 308.4 1/4" FVCR 1
500 mL 50-01271A-H 2.00 / 50.8 11.75 / 298.5
4.89 / 124.2
3.37 / 85.6 16.64 / 422.7 1/4" FVCR 1
600 mL 50-01272A-H 3.00 / 76.2 6.25 / 158.8
3.47 / 88.1
4.37 / 111.0 9.72 / 246.9 1/4" FVCR 2
1000 mL 50-01273A-H 3.00 / 76.2 10.00 / 254.0
3.47 / 88.1
4.37 / 111.0 13.47 / 342.1 1/4" FVCR 2
1500 mL 50-01274A-H 3.00 / 76.2 14.75 / 374.7
3.47 / 88.1
4.37 / 111.0 18.22 / 462.8 1/4" FVCR 2
1500 mL 50-01275A-H 4.00 / 101.6 8.75 / 222.3
3.47 / 88.1
4.37 / 111.0 12.22 / 310.4 1/4" FVCR 2
2000 mL 50-01276A-H 4.00 / 101.6 11.25 / 285.8
3.47 / 88.1
4.37 / 111.0 14.72 / 373.9 1/4" FVCR 2

SDC Standard UHP Bubbler with Vertical Fill-Ports:

uhp bubbler drawing outlet of uhp bubbler drawing uhp bubbler drawing outlet of uhp bubbler drawing

NOTE: VESSEL PRESSURE AND TEMPERATURE RATINGS VARY DEPENDING ON VALVE SELECTION.

Size/ Cyl Vol (mL) Part Number A (in/mm) B (in/mm)
C (in/mm)
D (in/mm) E (in/mm) F G (in/mm) Figure
150 mL 50-012169A-V 1.50 / 38.1 6.75 / 171.5
6.70 / 170.1
0.75 / 19.0 13.45 / 341.6 1/4" FVCR 1.63 / 41.4 1
300 mL 50-012170A-V 2.00 / 50.8 7.25 / 184.2
6.70 / 170.1
0.75 / 19.0 13.95 / 354.3 1/4" FVCR 1.63 / 41.4 1
500 mL 50-012171A-V 2.00 / 50.8 11.75 / 298.5
6.70 / 170.1
0.75 / 19.0 18.45 / 468.6 1/4" FVCR 1.63 / 41.4 1
600 mL 50-012172A-V 3.00 / 76.2 4.26 / 108.2
4.26 / 108.2
1.75 / 44.5 10.51 / 267.0 1/4" FVCR 0.60 / 15.3 2
1000 mL 50-012173A-V 3.00 / 76.2 10.00 / 254.0
4.26 / 108.2
1.75 / 44.5 14.26 / 362.2 1/4" FVCR 0.60 / 15.3 2
1500 mL 50-012174A-V 3.00 / 76.2 14.75 / 374.7
4.26 / 108.2
1.75 / 44.5 19.01 / 482.9 1/4" FVCR 0.60 / 15.3 2
1500 mL 50-012175A-V 4.00 / 101.6 8.75 / 222.3
4.26 / 108.2
1.75 / 44.5 13.01 / 330.5 1/4" FVCR 0.60 / 15.3 2
2000 mL 50-012176A-V 4.00 / 101.6 11.25 / 285.8
4.26 / 108.2
1.75 / 44.5 15.51 / 394.0 1/4" FVCR 0.60 / 15.3 2

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