MicroLine™ UHP Manual Gas Panels

Download Microline UHP Brochure

SDC's MicroLine™ UHP Manual Gas Panels are designed for high and low pressure, Ultra-High-Purity (UHP) gas delivery. Typically used for non-hazardous purge and process gas delivery applications, the MicroLine Series offers 1, 2, 3, 4 and 6-Valve designs. The plumbing design ensures low entrapped volumes and minimized dead-legs for increased purity. SDC's modular design concept allows the customer to tailor each system to meet their safety, process, purity AND budgetary goals. The product configurations range from the simplest 1-Valve design for non-hazardous use up to a 6-Valve design that offers HIGH PRESSURE VENT, LOW PRESSURE VENT, DEEP PURGE and venturi assisted EVAC. MicroLine Series UHP Gas Panels can also be fitted with a myriad of options including pressure relief, filtration, restrictive flow orifices, flexible pigtails and more.

Standard Configurations:

• 1-Valve [pre-regulator shutoff]
• 2-Valve [adds HP vent]
• 3-Valve [adds post-regulator shutoff]
• 4-Valve [adds PURGE]
• 4-Valve DP [adds DEEP PURGE PIGTAIL]
• 6-Valve [adds LP vent and EVAC]

Standard Features:

• 1-Valve [pre-regulator shutoff]
• 2-Valve [adds HP vent]
• 3-Valve [adds post-regulator shutoff]
• 4-Valve [adds PURGE]
• 4-Valve DP [adds DEEP PURGE PIGTAIL]
• 6-Valve [adds LP vent and EVAC]

Options:

• 10 Ra Surface Finish
• Pressure Relief
• Vent Check Valve [HP]
• Vent RFO [HP]
• Outlet filter [30 or 150 slm, 0.003 micron]
• DISS cylinder fittings
• 2 or 3-Position Outlet Splitter

Regulator Options:

• Single stage [tied-diaphragm]
• Dual stage [non-tied]
• Dual stage [tied]
• Absolute Pressure Regulator
• Hastelloy® Trim
• Absolute pressure regulator
• Pressure ranges [30, 60, 100, 250 psig]

Other Equipment Options:

• Pre-regulator filter [0.3 micron]
• Cylinder scales [w/LCD digital indicator]
• Cylinder scales [w/LCD digital indicator and setpoint alarm]
• CGA/DISS torque wrenches
• ESO valve
• Panel mounted solenoid for ESO Valve
• Pressure switches

Dimensions:

• 10.5”W x 15.5”H

MicroLine™ UHP Manual
6-Valve Panel